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VSHO-1CM
Application
Enhancing adhesion force between polyimide sensitive film and wafer
Hardening drying
Excellent temperature control capability
PC-based control program for convenient to use
Exclusive software for convenient system operation and data management
Good structure for sealing and heat insulation
Protecting specimens with overloading preventing system
Specification
| Model | VSHO-1CM | ||
|---|---|---|---|
| Oxygen Monitoring | O2 Analyzer | Optional | |
| Cooling Type | Water Cooling | 3 – 5 Kg/cm2, below 20℃ | |
| Purge | N2 Gas | 0 – 500 SCFH | |
| Exhaust | Cold Trap | Water Cooling | |
| Material | Internal | Stainless Steel | |
| External | Stainless Steel or Steel Powder Coating | ||
| Heater | 24 KW / Chamber | ||
| Insulation | Ceramic Wool | ||
| Safety Device | Electrical Over Temp. Limit | ||
| Mechanical Over Temp. Limit | |||
| Electric Requirement | 220VAC or 380VAC, 3 Phase, 50/60Hz | ||
| Network | SECS/GEM, LAN network | ||
Features
-Temperature range: 10℃ - 450℃
-Precision of temperature control: ±0.5℃
-Implementing digital recording functions and networking
-Temperature adjustment and multiple step curing functions via control panel
-Saving data in LAN network and CIM, and PC hard disk
-Automatic display of input/output time on LCD monitor