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VSP-88D-T

VSP-88D-T

Application

Specification

Power source RF Generator, 13.56MHz, 1000Watts
Vacuum pump Dry Pump 620L/min [Option : Oil Pump]
Gas flow controller 1 mass flow controller for standard [Option : Additional MFC (O2 or other gas)]
System dimension W1032 x H1717 x D1150mm (Except Tower Lamp)
Internal chamber dimension W342mm x H34mm x D362mm
Transfer method Pick & Place Jedec Tray Handing In-line system
Loading capacity 50Tray(In/Out elevating)
Weight 520kg
Utility 220VAC, 3Phase, Air 4~6kgf/㎠
PC based main control Windows XP & C++ Language & TFT LCD touch screen

Features

-High productivity over time
-Design of simple utility connection, and vertical up down chamber
-Single configuration for saving labor costs
-LAN networking and CIM