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VSP-88D Neo1

VSP-88D Neo1

Application

Adhesion strength improved in D/B, W/B and M/D processes Solution
for delamination in mold process Customer-tailored design

Specification

SystemDimension 1750(W)x 1250(D) x 1700(H)mm
InternalChamber Dimension 342.2(W)x 652.2(D) x 27.5(H)mm
PowerSource STD.RF generator, 1KW, 13.56MHz
VacuumPump STD.Dry Pump
GasFlow controller 1Mass Flow Controller
PCBased Main Control IndustrialPC, C++, Touch Panel
ActualSPH 560Strips/h (5 lanes)
Utility 220VAC, 3 Phase, 50/60Hz, Air 4~6 Kgh/cm3

Features

-Strip-based plasma system
-Automatic loading/unloading
-Rotating stage design
-Structure of electrode on top chamber
-Same loading/unloading stage zone
-Vacuum pump embedded design
-LAN networking and CIM
-Gripper moving type