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VSP-88D PP1

VSP-88D PP1

Application

Specification

System PCBase Control / Windows XP / Touch Screen
RFGenerator & Matcher 1kw/ 13.56Mhz / Air Cooling, Safety Interlock
VacuumPump
(Built in System)
OilRotary Pump(290L/Min@60Hz)
[*Optional: Dry Pump]
Gas Flow Controller 1Mass Flow Controller for Ar or other gas
SystemDimension (W)1870*(H)1755*(D)1095mm
ChamberDimension (W)306*(H)27.5*(D)281mm
ElectricalPower 220VAC,3Phase, 25A, 50/60Hz
Capability 3 Lane(Strip Width:62/74/77.5mm)
2 Lane(Strip Width: 95mm)
ConversionWidth 62/74/77.5/95mm
Weight 1,500kg
LeadTime(UPH) 51Strips/hr based on 180sec C/T
Facility CDA:5kg/cm2
N2:4kg/cm2
Ar:3kg/cm2

Features

- Accommodating package of wide and thin materials, material of significant warpage (max. 10 mm)
- Special designing for operating warped strip with carrier type handling
- Easy operation during changing material (substrate) size by mounted manual conversion function
- Electrode structure of special insulation allowing control of uniform surface contact angle: Less than 10 deg.
- PC-based program controlling (C++) and easy touch screen operation
- Enhancing convenience of operator and preventing erroneous operation with automatic magazine loading/unloading function
- Reliable cleaning capability with high quality and uniformity
- Design to expose to unique gas for rendering uniform cleaning effects
- Affordable price and low operation costs with localized system