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VSP-888 W2
Specification
System |
PC Base Control / Windows 7 / LCD Touch Screen |
Power source |
RF Generator, 13.56MHz, 1KW |
Vacuum pump |
1000L/min Dry pump |
Gas flow controller |
1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension |
W1580mm x H1900mm x D2090mm |
Electrical power |
220VAC, 3Phase, 60Hz, 30A |
Weight |
1400KG |
Loading capacity |
12 Inch 1 Wafer, FOUP Loading |
Conversion |
8 inch and 12 inch |
EFEM |
Robot |
End Effecter [Vacuum Chuck] |
Wafer Detection [Digital Vacuum Switch] |
Mapping Sensor [Photo Electric Sensor] |
Ailgner |
Wafer Detection [Judged by Pressure of Vacuum Chuck] |
Load Port Module |
Carrier Type [12 Inch FOUP] |