더 좋은 제품을 위해 항상 최선을 다하겠습니다.

VSP-888 W2

VSP-888 W2

Application

Specification

System PC Base Control / Windows 7 / LCD Touch Screen
Power source RF Generator, 13.56MHz, 1KW
Vacuum pump 1000L/min Dry pump
Gas flow controller 1 mass flow controller [Option : Additional MFC (O2 or other gas)]
System dimension W1580mm x H1900mm x D2090mm
Electrical power 220VAC, 3Phase, 60Hz, 30A
Weight 1400KG
Loading capacity 12 Inch 1 Wafer, FOUP Loading
Conversion 8 inch and 12 inch
EFEM Robot End Effecter [Vacuum Chuck]
Wafer Detection [Digital Vacuum Switch]
Mapping Sensor [Photo Electric Sensor]
Ailgner Wafer Detection [Judged by Pressure of Vacuum Chuck]
Load Port Module Carrier Type [12 Inch FOUP]

Features