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VSPS-1000

VSPS-1000

Application

Specification

System PC Base Control / Windows 7 / LCD Touch Screen
Power source RF Generator, 13.56MHz, 1KW
Vacuum pump 660L/min oil rotary pump [Option : Dry pump]
Gas flow controller 1 mass flow controller [Option : Additional MFC (O2 or other gas)]
System dimension W2700mm x H1850mm x D1500mm
Electrical power 220VAC, 3Phase, 60Hz, 40A
Weight 2500KG
Loading capacity W50~100mm, L200~250mm Substrate 1 Lane
Configuration Plasma Chamber Gripper & Pusher Handling
PLoader / Unloader Elevator / Pusher
Spray Coater [Metal Mask] 3-axis Robot [Servo Motor]
Transfer Conveyor Type
Spray Nozzle Air Atomizing Nozzle [Cyclone Method]
Coating Material Apply volume control pump pressure SUS Tank [5 Liter]

Features