Adhesion strength improved in D/B, W/B and M/D processes
Solution for delamination in mold process
Customer-tailored design
Power source | RF Generator, 13.56MHz, 600W [Option : 1000Watts] |
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Vacuum pump | 1560L/min oil rotary pump with 300ß©/h booster [Option : Dry pump] |
Gas flow controller | 1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension | W1110mm x H1850mm x D1010mm |
Internal chamber dimension | size W580mm x H530mm x D580mm |
Weight | 600KG |
Electrical power | 200 VAC, 3Phase, 30A |
Loading capacity | 8~16 Magazines depends on material / application |
PC based main control | Windows XP & C++ Language & TFT LCD touch screen |
- Cleaning capability improved by 20% over competitors by patented development of vertical shelf for slot magazine
- Large capacity: Loading up to 16 magazines (Standard: Loading 8 magazines)
- Oil rotary vacuum pump and booster pump embedded type (high vacuum)/Dry pump optional
- Applying semi-revolving door type for safety
- Improving wire adhesive strength and preventing mold delamination
- Designing nozzle for gas jetting for uniform cleaning
- Particular insulation mode for efficiently transferring RF power to stainless steel vacuum chamber and materials
- Operating at affordable costs by low system price and part localization
- Stainless steel vacuum chamber of long service life