System | PC Base Control / Windows 7 / Touch Screen |
---|---|
RF Generator & Matcher | 600W / 13.56㎒ / Air Cooling, Safety Interlock |
VacuumPump (Built in System) |
STD. Dry Pump |
Gas Flow Controller | 1Mass Flow Controller for Ar or other gas |
System Dimension | (W)1100*(H)1550*(D)1080㎜ |
ChamberDimension | (W)238*(H)37.4*(D)136㎜ |
ElectricalPower | 220VAC, 1Phase, 25A, 50/60㎐ |
Frame alignment Unit & Feeding unit | Unit Pick & Place method, 2Picker in/out Frame detector, overload detector |
Conversion Width | 65 ~ 75㎜ |
Weight | 400㎏ |
Lead Time | 30 seconds per 1 cycle(10 secs treatment) |
Facility | CDA : 5㎏/㎠ N2 : 4㎏/㎠ Ar : 3㎏/㎠ |