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VSPS-1000
Specification
System |
PC Base Control / Windows 7 / LCD Touch Screen |
Power source |
RF Generator, 13.56MHz, 1KW |
Vacuum pump |
660L/min oil rotary pump [Option : Dry pump] |
Gas flow controller |
1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension |
W2700mm x H1850mm x D1500mm |
Electrical power |
220VAC, 3Phase, 60Hz, 40A |
Weight |
2500KG |
Loading capacity |
W50~100mm, L200~250mm Substrate 1 Lane |
Configuration |
Plasma Chamber |
Gripper & Pusher Handling |
PLoader / Unloader |
Elevator / Pusher |
Spray Coater [Metal Mask] |
3-axis Robot [Servo Motor] |
Transfer |
Conveyor Type |
Spray Nozzle |
Air Atomizing Nozzle [Cyclone Method] |
Coating Material |
Apply volume control pump pressure SUS Tank [5 Liter] |